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By Sidorov D. A.

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GorrscHo. Y. J. CHABAL and R. REIF: Electrochemical Society Journal, 140( I ) , 33 16. 17. T. ARITA: S h Symposium on VLSI Technology, Kyoto, Japan, I995,4 I . 18. S. J. PEARTON, F. A. KA'IZ,U. K. CHAKRABARTI, E. LANE, W. S. HOBSON, R. F. KOPF, C. R. ABERNATHY. S WU. C. D. A. Bohlinp and J. C IVANKOVITS: Mat. Res. Soc. Symp. Proc. 282, 1993. I3 19. Y. J. CHUN, T. SUGAYA, Y. OKADA and M. KAWABE: Japanese Journal of Applied Physics 32, 1993, L287. 20. S. CRUN: Electronic Packaging and Productions, 33(7), 1993,24.

1849 angstroms and angstroms. The wavelength of I849 angstroms is absorbed by oxygen and forms ozone. The wavelength of angstroms is absorbed by hydrocarbons and ozone. Thus, generation and depletion ozone is a dynamic process in the presenceof these two wavelengths. Is The process is based upon the principle of photochemical oxidation. The contaminants (organicdirt) are energized by the ultraviolet light and are dissociated by absorption of short wavelength ultraviolet light. Molecular oxygendissociates into atomic oxygen on absorption UV light.

Heating rate also affected densification with higher heating rates resulting in higher density. x'studied densificationof titania coatings. They prepared films by spin coating solutions of titanium ethoxide in t-butyl alcohol. Figure shows the shrinkage for coatings heated at 60"C/min and 8000"C/min(by rapid thermal annealing). The coatings initially shrinkat a constant rate (region I in Figure 14). Then, shrinkage levels somewhat and again increases at a constant rate (region II), eventually reaching a plateau (region III).

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A Bounded Stabilizing Control for Nonlinear Systems Synthesized Using Parametric Families of Lyapunov Functions by Sidorov D. A.


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