Get Atomic Diffusion in Semiconductors PDF

By D. Shaw (auth.), D. Shaw (eds.)

ISBN-10: 1461586364

ISBN-13: 9781461586364

ISBN-10: 1461586380

ISBN-13: 9781461586388

The diffusion or migration of atoms in topic, of no matter what shape, is a simple end result of the lifestyles of atoms. In metals, atomic diffusion has a good verified place of value because it is famous that there are few metallurgical strategies which don't embrace the diffusion of 1 or extra of the elements. As regards semiconductors any thermal annealing remedy includes atomic diffusion. In semiconductor know-how diffusion strategies supply a necessary and uncomplicated technique of fabricating doped buildings. though the significance of diffusion within the preparative tactics of semiconductor buildings and samples, the diffusion established elements have received an empirical outlook verging nearly on alchemy. the 1st try to current a scientific account of semiconductor diffusion approaches was once made by means of Boltaks [11 in 1961. through the decade for the reason that Boltaks' e-book seemed a lot paintings germane to knowing the atomic mechanisms accountable for diffusion in semiconductors has been released. the article of the current ebook is to offer an account of, and to consolidate, current wisdom of semiconductor diffusion by way of simple thoughts of atomic migration in crystalline lattices. To this finish, exhaustive compilations of empirical information were refrained from as those can be found somewhere else [2, 31 : realization has been restricted to contemplating facts in a position to yielding perception into the actual techniques involved in atomic diffusion.

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Example text

They find that vacancy diffusio~ should be fast enough from the surface to maintain thermal equilibrium vacancy concentrations. Local defect equilibrium should therefore obtain. Hanneman and Anthony [121] have shown however that, in quenching from the diffusion temperature, very substantial redistributions of solute can occur near the crystal surface due to the vacancy flux to the surface. The redistribution of a solute during quenching has obvious and important implications in experimental diffusion work.

29. 1 eV will change concentrations by a factor -10 2 . 39) where K Diss and KB are the appropriate mass action constants. 40) The electro neutrality condition in this case is n + [BM] = p + [Bi! 41 ) 22 D. 41 is obviously complex but not physically unrealistic. 41 and if one of the interstitial species is effectively immobile. 40. Kroger [63] has discussed interactions in the second category which can be attractive or repulsive due to either Coulomb, strain, electron orbital or localized lattice vibrational mode (around a defect) interactions.

7) has been studied in this way. 1 The General Situation The existence of a net flow of a chemical species generally involves, but not always, a chemical concentration gradient of the species and arises in a system trying to attain equilibrium. It is this aspect of atomic diffusion which makes it of such practical importance in all forms of matter and not least in semiconductors. Manning [35] has pointed out that the so-called driving forces for diffusion can be split into real driving forces and non-driving forces on the basis of a simple but general definition of a driving force.

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Atomic Diffusion in Semiconductors by D. Shaw (auth.), D. Shaw (eds.)


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